• 专利附录
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    • 专利摘要:
    The invention relates to a method for manufacturing an electronic device, comprising: a) producing a plurality of chips (200) each comprising a plurality of connection pads (125, 126, 127, 128) and at least one first pad ( 202); b) providing a transfer substrate (250) comprising, for each chip, a plurality of connection pads (155, 156, 157, 158) and at least one second pad (252), one of the first and second pads being a permanent magnet and the other of the first and second pads being either a permanent magnet or a ferromagnetic material; and c) attaching the chips (200) to the transfer substrate (250) to connect the chip connection pads to the connection pads of the transfer substrate, using the magnetization force between the pads to align the ranges. connecting the chips to the corresponding connection pads of the transfer substrate.
    公开号:FR3066317A1
    申请号:FR1754045
    申请日:2017-05-09
    公开日:2018-11-16
    发明作者:Ivan-Christophe Robin；Stephane Caplet；Marie-Claire Cyrille；Bertrand Delaet；Sophie Giroud
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    METHOD FOR MANUFACTURING AN EMISSIBLE LED DISPLAY DEVICE
    Field
    The present application relates to the production of an emissive image display device with light-emitting diodes (LED), for example a television screen, computer screen, smartphone, digital tablet, etc.
    Presentation of the prior art
    It has already been proposed, in French patent application No. 1561421 filed on November 26, 2015, a method of manufacturing an image display device comprising a plurality of elementary electronic microchips arranged in a matrix on the same substrate. postponement. According to this method, the microchips and the transfer substrate are produced separately. Each microchip includes a stack of an LED and an LED driver. The control circuit includes a connection face opposite the LED, comprising a plurality of electrical connection pads intended to be connected to the transfer substrate for controlling the microchip. The transfer substrate comprises a connection face comprising, for each microchip, a plurality of electrical connection pads intended to be connected respectively to the electrical connection pads of the microchip. The chips are then attached to the transfer substrate, connection faces facing the connection face of the transfer substrate, and fixed to the transfer substrate so as to connect the electrical connection pads of each microchip to the corresponding electrical connection pads of the transfer substrate.
    It would be desirable to be able to at least partially improve certain aspects of this process.
    In particular, because of the relatively small dimensions of the microchips, and since each microchip comprises several distinct electrical connection pads, the alignment of the electrical connection pads of the microchips with the corresponding electrical connection pads of the transfer substrate is relatively difficult to achieve. It would be desirable to be able to facilitate the implementation of this alignment and / or improve the alignment accuracy obtained. summary
    Thus, one embodiment provides a method of manufacturing an electronic device, comprising the following steps: a) producing a plurality of chips each comprising: a plurality of electrical connection pads arranged on a connection face of the chip, and - at least one first pad disposed in the vicinity of the connection face of the chip; b) producing a transfer substrate comprising, for each chip: - a plurality of electrical connection pads arranged on a connection face of the transfer substrate, and - at least one second pad disposed in the vicinity of the connection face of the substrate transfer, one of the first and second pads being a permanent magnet and the other of the first and second pads being either a permanent magnet or of a ferromagnetic material; and c) fixing the chips to the transfer substrate by direct bonding so as to electrically connect the electrical connection pads of each chip to the corresponding electrical connection pads of the transfer substrate, using the magnetization force between the first and second pads for aligning the electrical connection pads of the chips with the corresponding electrical connection pads of the transfer substrate.
    According to one embodiment, in each chip, the first pad opens on the side of the connection face of the microchip.
    According to one embodiment, in each chip, the first pad is buried under the connection face of the chip.
    According to one embodiment, in each chip, the connection face of the chip is planar, the electrical connection areas of the chip being flush with an external face of a passivation layer of the chip.
    According to one embodiment, the second pads open on the side of the connection face of the transfer substrate.
    According to one embodiment, the second studs are buried under the connection face of the transfer substrate.
    According to one embodiment, the connection face of the transfer substrate is planar, the electrical connection pads of the transfer substrate flush with an external face of a passivation layer of the transfer substrate.
    According to one embodiment, the electrical connection pads of the transfer substrate project from the connection face of the transfer substrate.
    According to one embodiment: at the end of step a), the chips are placed on a support substrate with an inter-chip pitch less than the inter-chip pitch of the final display device; and in step c), several chips are selectively detached from the support substrate at the pitch of the final display device and fixed to the transfer substrate at this same pitch.
    According to one embodiment: at the end of step a), the chips are only placed, without gluing, on the support substrate; and in step c) the transfer substrate is brought above the chips, connection side facing the connection faces of the chips, so as to simultaneously take several chips at the pitch of the final display device.
    According to one embodiment, the support substrate comprises cavities in which the chips are arranged so that the chips are held laterally by the walls of the cavities.
    According to one embodiment, the bottom of each cavity of the support substrate is non-planar.
    According to one embodiment, each chip comprises a stack of an LED and an active LED control circuit.
    Another embodiment provides an emissive LED display device produced by a method as defined above.
    Brief description of the drawings
    These characteristics and advantages, as well as others, will be explained in detail in the following description of particular embodiments made without implied limitation in relation to the appended figures among which: FIG. 1 is a sectional view schematically illustrating and partial a step of transferring a microchip onto a transfer substrate, according to an example of a method of manufacturing an emissive LED display device; FIG. 2 is a sectional view schematically and partially illustrating a step of transferring a microchip onto a transfer substrate, according to an example of an embodiment of a method of manufacturing a display device emissive LED; Figure 3 is a sectional view schematically and partially illustrating a step of transferring a microchip onto a transfer substrate, according to another example of an embodiment of a method of manufacturing a device emissive LED display; Figure 4 is a sectional view schematically and partially illustrating a step of transferring a microchip on a transfer substrate, according to another example of an embodiment of a method of manufacturing a device emissive LED display;
    FIGS. 5A, 5B and 5C are sectional views illustrating steps of an example of an embodiment of a method of manufacturing an emissive LED display device; FIG. 6 is a sectional view illustrating an alternative embodiment of the method of FIGS. 5A to 5C; FIGS. 7A, 7B, 7C and 7D are sectional views illustrating steps of another example of an embodiment of a method of manufacturing an emissive LED display device; FIGS. 8A, 8B, 8C and 8D are sectional views illustrating steps of another example of an embodiment of a method for manufacturing an emissive LED display device; Figure 9 is a sectional view illustrating an alternative embodiment of the method of Figures 8A to 8D; and FIGS. 10A, 10B, 10C, 10D and 10E are sectional views illustrating steps of an example of a method for manufacturing a microchip of an emissive LED display device according to one embodiment.
    detailed description
    The same elements have been designated by the same references in the different figures and, moreover, the various figures are not drawn to scale. For the sake of clarity, only the elements useful for understanding the described embodiments have been shown and are detailed. In particular, the manufacture of the elementary microchips and of the transfer substrate of the display devices described has not been detailed, the manufacture of these elements being within the reach of those skilled in the art from the teachings of the present description. For example, the elementary microchips and the transfer substrate can be manufactured according to methods identical or similar to those described in the French patent application No. 1561421 mentioned above. In the following description, when reference is made to qualifiers for absolute position, such as "front", "back", "up", "down", "left", "right", etc., or relative, such as "above", "below", "upper", "lower", etc., or to orientation qualifiers, such as "horizontal", "vertical", etc., there reference is made to the orientation of the figures, it being understood that, in practice, the devices described can be oriented differently. Unless otherwise specified, the expressions "approximately", "substantially, and" on the order of "mean to the nearest 10%, preferably to 5 o.
    Figure 1 is a sectional view schematically and partially illustrating a step of transferring a microchip 100 onto a transfer substrate 150, according to an example of a method of manufacturing an emissive LED display device.
    FIG. 1 represents more particularly the microchip 100 and the transfer substrate 150 before the actual step of fixing the microchip on the transfer substrate.
    In practice, a display device can comprise a plurality of identical or similar elementary chips 100 mounted on the same transfer substrate in a matrix arrangement according to rows and columns, the chips being connected to electrical connection elements of the substrate. for their control, and each microchip corresponding for example to a pixel of the display device.
    The microchip 100 comprises, in an upper portion, an inorganic semiconductor LED 110, and, in a lower portion integral with the upper portion, an active control circuit 120 based on monocrystalline silicon, adapted to control the emission of light by the LED.
    LED 110 comprises at least one homojunction or heterojunction, for example a PN junction formed by a stack of an upper semiconductor layer of type N 112 and of a lower semiconductor layer of type P 114, and two electrical contacts 116 and 118 (respectively in contact with the layer 112 and with the layer 114 in the example shown) for injecting an electric current through the stack, in order to produce light. By way of example, LED 110 is an LED with gallium nitride or based on any other III-V semiconductor suitable for producing an LED.
    The control circuit 120 is produced in and on a block of monocrystalline silicon 121, and comprises electronic components, and in particular one or more transistors and at least one capacitive element for maintaining a polarization signal, for the individual control of the LED 110. The upper face of the control circuit 120 is in mechanical and electrical contact with the LED 110. The lower face of the circuit 120, defining a connection face of the microchip, comprises a plurality of electrical connection pads intended to be connected to corresponding electrical connection pads of the transfer substrate 150 for controlling the microchip. In the example shown, the lower face of the circuit 120 comprises four electrical connection pads 125, 126, 127 and 128. The pads 125 and 12 6 are intended to receive respectively a low supply potential (for example the ground) Vn and a high supply potential (that is to say greater than the low supply potential) Vp of the microchip. Tracks 127 and 128 are intended to receive control signals from the microchip. More particularly, the range 127 is intended to receive a signal Vsel for selecting the microchip, and the range 128 is intended to receive a signal Vdata for adjusting the brightness level of the microchip. The connection pads 125, 126, 127 and 128 are for example made of metal, for example copper, gold or titanium. In this example, the control circuit 120 comprises two MOS transistors 122 and 123 and a capacitive element 124, for example a capacitor. The transistor 122, for example a P channel transistor, has a first conduction node (source or drain) connected to the connection pad 12 6 (Vp) of the microchip, a second conduction node (drain or source) connected to the anode contact terminal 118 of the LED 110, and a control node (grid) connected to an intermediate node al of the circuit 120. The capacitive element 124 has a first electrode connected to the node al and a second electrode connected to the connection area 126 (Vp) of the microchip. The transistor 123, for example an N-channel transistor has a first conduction node connected to the connection pad 128 (Vdata) of the microchip, a second conduction node connected to the node al, and a control node connected to the pad of connection 127 (Vsel) of the microchip. The microchip 100 further comprises an insulated conductor via 129 connecting the electrical connection pad 125 (Vn) of the microchip to the cathode contact terminal 116 of the LED 110.
    The operation of the elementary microchip 100 during a phase of updating the pixel brightness level is as follows. The transistor 123 is closed (turned on) by the application of a suitable control signal on the terminal 127 (Vsel). The capacitive element 124 is then charged at a voltage level which is a function of the adjustment signal applied to the terminal 128 (Vdata) of the microchip. The level of the adjustment signal Vdata fixes the potential of the node al, and consequently the intensity of the current injected into the LED by the transistor 122, and therefore the light intensity emitted by the LED. The transistor 123 can then be reopened. The node al then remains at a potential substantially equal to the potential Vdata. Thus, the current injected into the LED remains substantially constant after the reopening of the transistor 123, and this until the next update of the potential of the node al.
    The transfer substrate 150 comprises for example a plate or a support sheet 151 made of an insulating material, on which are arranged electrical connection elements, for example conductive tracks and pads. The transfer substrate 150 is for example a passive substrate, that is to say that it only comprises electrical connection elements for supplying the control and supply signals of the microchips. The transfer substrate 150 comprises a connection face, its upper face in the example shown, intended to receive the microchips 100. For each microchip of the display device, the transfer substrate 150 comprises, on its connection face, a plurality of electrical connection pads (one per electrical connection pad of the microchip) intended to be connected respectively to the electrical connection pads of the microchip. Thus, in this example, for each microchip 100 of the display device, the transfer substrate 150 comprises four electrical connection pads 155, 156, 157 and 158 intended to be connected respectively to the electrical connection pads 125, 126, 127 and 128 of the microchip 100, for supplying the control signals Vn, Vp, Vsel and Vdata of the microchip. The electrical connection pads 155, 156, 157 and 158 of the transfer substrate are for example of the same conductive material as the electrical connection pads 125, 126, 127 and 128 of the microchips, for example copper, gold or titanium.
    During the transfer of the microchip 100 onto the transfer substrate 150, the connection face of the microchip is brought into contact with the connection face of the transfer substrate so as to electrically connect the electrical connection pads 125, 126, 127 and 128 of the microchip respectively to the corresponding electrical connection pads 155, 156, 157 and 158 of the transfer substrate. The microchip 100 is fixed on the transfer substrate by direct bonding, that is to say without the addition of adhesive material or solder at the interface between the microchip and the substrate, for example at temperature and pressure room. For this, the electrical connection pads of the microchip and of the transfer substrate may have been prepared beforehand to obtain sufficient flatness, for example a roughness less than 1 nm, to achieve direct bonding of the pads 125, respectively 126, respectively. 127, respectively 128, on tracks 155, respectively 156, respectively 157, respectively 158. Annealing may optionally be provided after bonding, for example at a temperature between 150 and 250 ° C., to increase the strength of the bonding.
    As indicated above, a difficulty of such a method lies in the alignment of the electrical connection pads of the microchip on the corresponding electrical connection pads of the transfer substrate in order to obtain a good electrical connection between the microchip and the transfer substrate.
    Indeed, the microchips have for example, in top view, a maximum dimension less than or equal to 100 μm, for example less than or equal to 50 μm, for example of the order of 10 μm. Each microchip comprising several electrical connection areas (four in the example in FIG. 1), the alignment of the microchips must be very precise, for example precise to better than 1 μm.
    FIG. 2 is a sectional view schematically and partially illustrating a step of transferring a microchip 200 onto a transfer substrate 250, according to an example of an embodiment of a method for manufacturing a device d emissive LED display. FIG. 2 represents more particularly the microchip 200 and the transfer substrate 250 before the actual step of fixing the microchip on the transfer substrate.
    The microchip 200 and the transfer substrate 250 of FIG. 2 comprise elements common to the microchip 100 and the transfer substrate 150 of FIG. 1. In the following, only the differences between the embodiment of FIG. 2 and the The example of Figure 1 will be detailed.
    The microchip 200 of FIG. 2 comprises the same elements as the microchip 100 of FIG. 1, arranged in substantially the same way, and differs from the microchip 100 of FIG. 1 mainly in that it further comprises, in the vicinity of its connection face, that is to say closer to its connection face than to its opposite face, a stud 202 made of a ferromagnetic material, for example a nickel-iron alloy.
    In the example of FIG. 2, the stud 202 opens on the side of the connection face of the microchip.
    In addition, in this example, the connection face of the microchip 200 is substantially flat, that is to say that the electrical connection pads 125, 126, 127 and 128 and the ferromagnetic pad 202 of the microchip are flush with the level of the underside of a substantially planar insulating layer 203 for passivation of the microchip. By way of example, the electrical connection pads 125, 126, 127 and 128 and the ferromagnetic pad 202 of the microchip are formed according to a damascene type method, comprising a step of depositing the insulating passivation layer 203 over the entire lower surface of the microchip, followed by a step of etching cavities intended to receive the electrical connection pads 125, 126, 127 and 128 and the stud 202 on the side of the lower face of the microchip, followed by a step of filling the cavities with a conductive material to form the electrical connection pads and with a ferromagnetic material to form the pad 202, followed by a mechanochemical polishing step to planarize the lower surface of the chip so as to level the undersides of the electrical connection pads 125, 126, 127 and 128 and of the pad 202, and the underside of the passivation layer 203. For example, the pads of con electrical connection 125, 126, 127 and 128 of the microchip 200 are made of the same material as the ferromagnetic pad 202, which simplifies the method of manufacturing the microchips.
    The transfer substrate 250 of FIG. 2 comprises the same elements as the transfer substrate 150 of FIG. 1, and differs from the transfer substrate 150 of FIG. 1 mainly in that it further comprises, near its face. connection, that is to say closer to its connection face than to its opposite face, for each microchip 200 of the display device, in addition to the connection pads 155, 156, 157 and 158 intended to be connected to the connection pads 125, 126, 127 and 128 of the microchip, a permanent magnet 252 forming a stud having, seen from the front, substantially the same general shape and the same dimensions as the ferromagnetic stud 202 of the microchip.
    The positioning of the pad 252 with respect to the electrical connection pads 155, 156, 157 and 158 of the transfer substrate is substantially identical to the positioning of the pad 202 with respect to the electrical connection pads 125, 126, 127 and 128 of the microchip. In other words, when the electrical connection pads 125, 126, 127 and 128 of the microchip are aligned vertically respectively with the electrical connection pads 155, 156, 157 and 158 of the transfer substrate, the ferromagnetic pad 202 of the microchip located vertical to the permanent magnet 252 of the transfer substrate.
    In the example of FIG. 2, the magnet pad 252 opens on the side of the connection face of the transfer substrate.
    In addition, in this example, the connection face of the transfer substrate is substantially flat, that is to say that the electrical connection pads 155, 156, 157 and 158 and the magnet pad 252 of the transfer substrate are flush with the level of the upper face of a substantially planar insulating layer 253 for passivation of the transfer substrate. By way of example, the electrical connection pads 155, 156, 157 and 158 and the magnet pad 252 of the transfer substrate are formed according to a damascene type method, comprising a step of depositing the insulating passivation layer 253 on all the upper surface of the transfer substrate, followed by a step of etching cavities intended to receive the electrical connection pads 155, 156, 157 and 158 and the stud 252 on the side of the upper face of the transfer substrate, followed by a step of filling the cavities with a conductive material to form the electrical connection pads and with a permanent magnet material to form the pad 252, followed by a mechanochemical polishing step to planarize the upper surface of the substrate so as to set a same level the upper faces of the electrical connection pads 155, 156, 157 and 158 and of the pad 252, and the upper face of the passivation layer 253. By way of example, the pad magnet 252 consists of a stack of several metallic layers, for example a stack of an antiferromagnetic layer, for example of a platinum-manganese, iridium-manganese or iron-manganese alloy, and of a ferromagnetic layer, for example in an iron-cobalt, iron-cobalt-boron or nickel-iron alloy, in contact with the antiferromagnetic layer. As a variant, the magnet pad may consist of an alternation of several antiferromagnetic layers and of several alternating ferromagnetic layers. The stack can also comprise a lower primer layer, for example made of tantalum, or a ruthenium-tantalum alloy, and an upper protective layer, for example made of tantalum. Each layer of the magnet pad has for example a thickness of between 5 and 100 nm. The layers of the magnet pad can for example be deposited by physical vapor deposition (PVD). After deposition and etching to the desired dimensions, an annealing of the magnet pad can be provided, for example at a temperature between 150 and 400 ° C, for example under a magnetic field between 0.1 and 2 T. As an example the magnet pad consists of a stack of: - 25 successive repetitions of a stack of a tantalum layer 5 nm thick, a layer of a Pt50Mn50 alloy 7 nm thick, a layer of an Fe20Co80 alloy 20 nm thick, and a layer of a Pt50Mn50 alloy 7 nm thick; and - an upper tantalum protective layer 10 nm thick. As a variant, the magnet pad consists of a stack of: - a tantalum layer 5 nm thick; - a layer of copper 2 nm thick; - 30 successive repetitions of a stack of a layer of an Ir20Mn80 alloy 7 nm thick and a layer of an Fe65Co35 alloy 25 nm thick; - a layer of an Ir20Mn80 alloy 7 nm thick; and - a layer of tantalum 10 nm thick.
    In front view, the magnet pad 252 and the ferromagnetic pad 202 each have, for example, a generally square, rectangular or circular shape, with a maximum dimension of between 0.5 and 100 μm. The studs 202 and 252 preferably have, in front view, a maximum dimension of the same order of magnitude as the desired alignment precision, for example a maximum dimension of between 0.5 and 5 μm, for example of the order from 1 to 2 pm.
    During the actual transfer step, the microchip 200 is brought opposite the transfer substrate 250, connection side facing the connection face of the transfer substrate. More particularly, the electrical connection pads 125, 126, 127 and 128 of the microchip are positioned approximately perpendicular to the corresponding electrical connection pads 155, 156, 157 and 158 of the transfer substrate, without however bringing the face into contact. of connection of the microchip with the connection face of the transfer substrate. The microchip is then released, that is to say made free to move, in particular laterally, relative to the transfer substrate. At this time, the magnetization force between the ferromagnetic pad 202 of the microchip and the corresponding magnet pad 252 of the transfer substrate leads to bonding the connection face of the microchip against the connection face of the transfer substrate, aligning precisely the ferromagnetic pad 202 on the magnet pad 252, and therefore the electrical connection pads of the microchip on the corresponding electrical connection pads of the transfer substrate.
    It will be noted that the self-alignment of the microchip on the transfer substrate is carried out essentially before the connection face of the microchip comes into contact with the connection face of the transfer substrate. In fact, once the connection faces of the microchip and the transfer substrate are brought into contact, direct bonding is immediately obtained between the two connection faces, preventing any movement of the microchip relative to the transfer substrate. To avoid too rapid direct bonding of the microchip on the transfer substrate, and thus increase the time available for self-alignment of the microchip on the transfer substrate, a liquid may possibly be placed at the interface between the microchip and the transfer substrate during transfer.
    Once the microchip 200 has been aligned on the transfer substrate with the assistance of the ferromagnetic pad 202 and the magnet pad 252, and the direct bonding of the microchip on the substrate 250 obtained, annealing may possibly be provided, by example at a temperature between 150 and 250 ° C., to increase the bonding energy and improve the electrical connection between the connection pads 125, 126, 127 and 128 of the microchip and the connection pads 155, 156, 157 and 158 of the transfer substrate.
    Figure 3 is a sectional view schematically and partially illustrating an alternative embodiment of the transfer method of Figure 2. As in the example of Figure 2, Figure 3 shows the microchip 200 and the transfer substrate 250 before the actual step of fixing the microchip on the transfer substrate.
    The microchip of Figure 3 includes the same elements as the microchip of Figure 2, arranged in substantially the same manner.
    The transfer substrate of Figure 3 comprises the same elements as the transfer substrate of Figure 2, and differs from the transfer substrate of Figure 2 mainly in that, in the example of Figure 3, the connection pads electrical 155, 156, 157 and 158 and the magnet pad 252 of the transfer substrate form protrusions projecting from the connection face of the substrate. Thus, unlike the transfer substrate of Figure 2 whose connection face is substantially planar, the transfer substrate of Figure 3 has a structured connection face. More particularly, in the example shown, the protrusions formed by the electrical connection pads 155, 156, 157 and 158 and the magnet pad 252 have a mesa or plateau shape.
    In practice, as will be explained in more detail below in relation to FIGS. 5A to 5C, during the transfer of the microchips 200 onto the substrate 250, several microchips placed on the same support substrate (not visible in FIG. 3) , according to an inter-chip pitch less than the inter-chip pitch of the final device, can be brought opposite the transfer substrate. Only a part of the microchips is then transferred from the support substrate to the transfer substrate, at the pitch of the transfer substrate, the other microchips remaining on the support substrate to be transferred later either to another region of the transfer substrate or to a other transfer substrate.
    An advantage of the variant of FIG. 3 is that the protruding shape of the electrical connection pads 155, 156, 157 and 158 and of the magnet pad 252 of the transfer substrate allows that only the microchips transferred from the support substrate to the support substrate. transfer are brought into contact with the connection face of the transfer substrate. This makes it possible in particular to avoid damaging the connection face of the microchips intended to remain on the support substrate.
    In another variant, only the electrical connection pads 155, 156, 157 and 158 form protrusions projecting from the connection face of the transfer substrate 250, the magnet pad 252 being flush with the upper face of the passivation layer 253 such that described above in relation to FIG. 2, or being buried under the connection face of the transfer substrate as described below in relation to FIG. 4.
    Figure 4 is a sectional view schematically and partially illustrating another alternative embodiment of the transfer method of Figure 2. As in the example of Figure 2, Figure 4 shows the microchip 200 and the transfer substrate 250 before the actual step of fixing the microchip on the transfer substrate.
    The microchip of FIG. 4 comprises the same elements as the microchip of FIG. 2, and differs from the microchip of FIG. 2 in that, in the microchip of FIG. 4, the ferromagnetic stud 202 does not surface at the level of the connection face of the microchip, but is buried under the connection face of the microchip.
    Similarly, the transfer substrate of FIG. 4 comprises the same elements as the transfer substrate of FIG. 2, and differs from the transfer substrate of FIG. 2 in that, in the transfer substrate of FIG. 4, the magnet pad 252 is not flush with the connection face of the substrate, but is buried under the connection face of the substrate. As a variant, only one of the studs 202 and 252 is buried, the other stud flush with the level of the external face of the passivation layer covering the connection face.
    In another variant, the ferromagnetic pad 202 of the microchip is buried, and the magnet pad 252 of the transfer substrate projects from the connection face of the transfer substrate, as described in relation to FIG. 3.
    FIGS. 5A, 5B and 5C are sectional views illustrating steps of an example of an embodiment of a method of manufacturing an emissive LED display device.
    FIG. 5A illustrates a step during which, after having formed the microchips 200 separately on a support substrate 401, and the transfer substrate 250, the microchips 200 are positioned approximately opposite the corresponding transfer zones of the substrate 250, connection faces of the microchips facing the connection face of the substrate 250, using the support substrate 401 as a handle. By way of example, the method for manufacturing microchips 200 is a method of the type described in the French patent application No. 1561421 mentioned above, comprising: the formation of a matrix of identical or similar elementary control circuits 120, in and on a silicon substrate; the separate formation, on a suitable growth substrate, for example of sapphire, of a corresponding matrix of identical or similar elementary LEDs 110; the transfer, one over the other, of the matrix of control circuits 120 and of the matrix of LEDs 110, the two matrices being joined to one another, for example by heterogeneous direct bonding; removing the LED growth substrate and replacing it with a support substrate, corresponding to the substrate 401 in FIG. 5A, fixed by a so-called temporary bonding, having a lower adhesion energy than the initial bond between the microchips and the LED growth substrate, so as to facilitate a later step of microchip sampling; and the individualization of each microchip 200 by engraving around it a trench extending vertically from the connection face of the microchip to the substrate 401, so as to obtain a matrix of individualized microchips attached to the support substrate 401 by their LEDs, as shown in FIG. 5A. Alternatively, the step of replacing the LED growth substrate with a different support substrate can be omitted, in which case the substrate 401 in Figure 5A is the LED growth substrate. In this case, the connection between the substrate 401 and the LEDs 110 may possibly be weakened, by means of a laser beam projected through the substrate 401 from its rear face, that is to say its face opposite to the microchips 200 .
    In another variant, the stacking of the semiconductor layers constituting the LEDs can be added to the matrix of elementary control circuits 120 before individualization of the elementary LEDs 110. The growth substrate of the LEDs is then removed to allow the individualization of the LEDs 110 , then the support substrate 401 can be glued to the face of the LEDs 110 opposite to the control circuits 120.
    For the sake of simplification, there is shown in FIGS. 5A to 5C, as well as in the following figures (up to FIG. 9), a single electrical connection area 125 per microchip. In practice, as indicated above, each microchip comprises several electrical connection areas on its connection face. In addition, still for the sake of simplification of the figures, the microchips 200 have not been detailed in FIGS. 5A to 5C and following. Only the ferromagnetic pad 202 is visible in addition to the electrical connection area 125.
    Similarly, the transfer substrate 250 has not been detailed in FIGS. 5A to 5C and following. For each reception area of a microchip, only the magnet pad 252 and a single electrical connection area 155 are shown.
    The microchips 200 attached to the support substrate 401 by their LEDs are brought opposite to corresponding reception areas of the transfer substrate 250, connection faces facing the connection face of the substrate 250.
    The support substrate 401 is then released, that is to say left free to move, in particular laterally, relative to the transfer substrate 250. At this stage, the magnetization force exerted between the ferromagnetic pad 202 of each microchip and the corresponding magnet pad 252 of the transfer substrate makes it possible to precisely align the electrical connection pads of each microchip on the corresponding electrical connection pads of the transfer substrate.
    It will be noted that the fact of simultaneously bringing several microchips 200 onto the substrate 250 makes it possible to benefit from a higher alignment restoring force than if a single chip was added, insofar as the magnetization forces exerted by the couples ferromagnetic pad / magnet pad associated with the different deferred microchips add up.
    The microchips 200 are then fixed on the transfer substrate 250 by direct bonding of the electrical connection pads of the microchips on the corresponding electrical connection pads of the transfer substrate.
    The microchips 200 are then detached from the support substrate 401, and the latter is removed.
    In practice, the pitch P40I of the microchips on the substrate 401, for example of the order of 10 to 50 μm, may be less than the pitch P250 of the final device after transfer to the substrate 250, for example between 15 μm and 1 mm , for example of the order of 100 to 500 pm.
    In the example described in relation to FIGS. 5A to 5C, as well as in the examples of the following figures, the pitch P250 of the microchips 200 on the transfer substrate 250 is a multiple of the pitch P40I of the microchips on the support substrate 401. Thus, provision is made to transfer only part of the microchips 200 of the substrate 401 onto the substrate 250, in step with the transfer substrate 250 (ie a chip on n with η = Ρ25θ / Ρ4θΐ) 'then, if necessary, to shift the substrate 401 with the remaining microchips for transferring another part of the microchips 200 from the substrate 401 to the substrate 250, and so on until all the microchips of the display device have been fixed on the transfer substrate 250. At each iteration, once the microchips 200 have been aligned on the transfer substrate with the assistance of the ferromagnetic pad 202 / magnet pad 252 pairs (FIG. 5B), the microchips 200 are selectively detached from the support substrate 401. The su support base 401 and the remaining microchips 200 are then removed as illustrated in FIG. 5C.
    To selectively detach the microchips 200 from the support substrate 401, a slight bonding can be provided between the support substrate 401 and the microchips 200, so that only the microchips 200 aligned with corresponding connection pads of the transfer substrate 250 are torn off during the withdrawal of the support substrate 401, under the effect of the magnetization force exerted between the ferromagnatic pad 202 and the magnet pad 252, or under the effect of the direct bonding force between the microchip and the transfer substrate . For example, the microchips 200 are bonded to the support substrate 401 using a polymer of the C4F8, TEFLON, or OPTOOL DSX type, or by any other adhesive making it possible to obtain bonding energy between the microchips. 200 and the support substrate 401 lower than the adhesion energy between the microchips 200 and the transfer substrate 250. As a variant, in the case where the support substrate 401 is transparent, the bonding of the microchips 200 to the substrate support 401 can be produced by a resin adapted to be degraded by ultraviolet radiation, for example a resin of the BREWER 305 type. Localized laser exposure of the resin can then be carried out through the substrate 401, to selectively detach part of the microchips 200.
    In the case where the support substrate 401 is the growth substrate for the LEDs 110, the latter may have a relatively strong adhesion with the microchips 200. In this case, it is possible to use a method of selective detachment by means of a laser beam. localized projected through the substrate 401, for example a method of the type described in patent application US6071795. For example, in the case of a sapphire growth substrate 401 and of gallium nitride LEDs, a laser at 458 nm can be used, with an optical power of between 10 mW / mm ^ and 10 W / mm ^, and an exposure time of between 1 second and 1 minute for each chip to be peeled off. After exposure to the laser, liquid gallium is present at the interface between the LED and the sapphire. The microchip then holds by capillarity on the substrate 401, until it is transferred to the substrate 250.
    It will be noted that to increase the bonding force between the microchips 200 and the transfer substrate 250, and thus facilitate the detachment of the support substrate 401, it is possible to carry out, before the withdrawal of the substrate 401 (FIG. 5C), an annealing aimed at increase the bonding energy between the microchips and the transfer substrate, for example at a temperature between 150 and 250 ° C.
    Figure 6 is a sectional view illustrating an alternative embodiment of the method of Figures 5A to 5C.
    The method of FIG. 6 differs from the method of FIGS. 5A to 5C mainly in that, in the method of FIG. 6, the support substrate 401 of FIGS. 5A to 5C is replaced by a support substrate 501, comprising at least one through opening 503 opposite each microchip 200. The provision of through openings 503 makes it possible to facilitate selective detachment of the microchips 200 when they are transferred to the substrate 250. For example, the microchips 200 are kept glued to the substrate 501 by an adhesive, and a stream of compressed air is injected locally into the openings 503 located opposite the microchips to be detached, to obtain their detachment. Alternatively, micro needles can be used to selectively push the microchips to be detached through the corresponding openings 503. As a variant, the microchips are kept glued to the substrate 501 by aspiration through the openings 503, then the aspiration is interrupted in a localized manner opposite the microchips to be detached, to obtain their detachment.
    FIGS. 7A to 7D are sectional views illustrating steps of another example of an embodiment of a method of manufacturing an emissive LED display device.
    FIG. 7A illustrates a step during which, after having formed the microchips 200 on a first support substrate 401 in an identical or similar manner to what has been described previously in relation to FIG. 5A, the microchips 200 are transferred from the substrate 401 on a second support substrate 601, without change of pitch. For this, the microchips 200 are arranged on the substrate 601 by using the substrate 401 as a handle. The microchips 200 are brought into contact, by their connection faces, that is to say their faces opposite to the LEDs 110, with one face of the substrate 601. A temporary bonding using an adhesive layer can be provided between the connection face of the microchips and the substrate 601. As a variant, the microchips 601 are simply placed on the upper face of the substrate 601. The initial support substrate 401 is then removed.
    FIG. 7B illustrates a step subsequent to the withdrawal of the initial support substrate 401, during which the microchips 200 are transferred from the second support substrate 601 to the upper face of a third support substrate 603, still retaining the initial pitch . In the case where the microchips 200 are bonded to the temporary support substrate 601 by an adhesive layer, the microchips can be transferred to the upper face of the substrate 603 by using the substrate 601 as a handle. In the case where the microchips 200 are simply placed on the upper face of the temporary support substrate 601, the substrate 603 can be placed on the upper face of the microchips 200, that is to say on the LED side 110, then the assembly comprising the substrate 601, the microchips 200 and the substrate 603 is turned over so that the microchips 200 are found on the upper face side of the substrate 603. The temporary support substrate 601 is then removed.
    FIG. 7C illustrates a step subsequent to the withdrawal of the substrate 601. At this stage, the microchips 200 are simply placed (and not glued) on the upper face of the support substrate 603, the connection faces of the microchips being turned upwards, that is to say opposite of the substrate 603.
    The transfer substrate 250 on which it is desired to fix microchips 200, is then positioned above the substrate 603 and microchips 200, connection face facing the connection faces of the microchips. The microchips 200, placed on the support substrate 603, are brought opposite the corresponding reception areas of the transfer substrate 250.
    The magnetization force exerted by the magnet pads 252 of the transfer substrate on the ferromagnetic pads 202 of the microchips attracts the microchips 200 (which are free to move relative to the substrate 603 due to the absence of bonding between the microchips and the substrate 603), and leads to precise self-alignment of the connection pads of each microchip on the corresponding electrical connection pads of the transfer substrate. The microchips 200 are then fixed on the transfer substrate 250 by direct bonding.
    The support substrate 603 and the remaining microchips 200 can then be removed as shown in Figure 7D.
    FIGS. 8A to 8D are sectional views illustrating steps of another example of an embodiment of a method of manufacturing an emissive LED display device.
    The method of FIGS. 8A to 8D is similar to the method of FIGS. 7A to 7D, and differs from the method of FIGS. 7A to 7D mainly in that, in the method of FIGS. 8A to 8D, the support substrates 601 and 603 of the method of FIGS. 7A to 7D are replaced by substrates 701 and 703 respectively. The substrates 701 and 703 differ from the substrates 601 and 603 in that they each comprise, on the side of their face intended to receive the microchips 200, cavities 702 (for the substrate 701), respectively 704 (for the substrate 703), intended to receive microchips 200.
    More particularly, during the transfer of the microchips 200 from the initial support substrate 401 to the substrate 701 (FIG. 8A), each microchip 200 is placed in a cavity 702 of the substrate 701, and is separated from the other microchips 200 transferred to the substrate 701 by the side walls of the cavity 702. In other words, the pitch of the cavities 702 of the substrate 701 is substantially identical to the pitch of the microchips 200 on the substrate 401. In a similar manner to what has been described in relation to FIGS. 7A to 7D, the microchips 200 can be fixed to the temporary support substrate 701 by an adhesive layer, or can be simply placed on the substrate 701. The initial support substrate 401 is then removed.
    Furthermore, during the transfer of the microchips 200 from the temporary support substrate 701 to the support substrate 703 (FIG. 8B), each microchip 200 is placed in a cavity 704 of the substrate 703, and is separated from the other microchips 200 by the side walls. of the cavity 704. In other words, the pitch of the cavities 704 of the substrate 703 is substantially identical to the pitch of the microchips 200 on the initial substrate 401. In a similar manner to what has been described in relation to FIGS. 7A to 7D, the microchips 200 are simply placed on the support substrate 703.
    The other steps of the method are identical or similar to what has been described previously in relation to FIGS. 7A to 7D.
    An advantage of the variant of FIGS. 8A to 8D is to facilitate the handling of the support substrates 701 and / or 703 once the latter have been loaded with microchips 200, thanks to the lateral support of the microchips obtained by the provision of the cavities 702, 704.
    Figure 9 is a sectional view illustrating an alternative embodiment of the method of Figures 8A to 8D.
    FIG. 9 more particularly illustrates a final step of the method, corresponding to the step of FIG. 8D.
    In the variant of FIG. 9, the support substrate 703 of the method of FIGS. 8A to 8D is replaced by a support substrate 803. The substrate 803 comprises cavities 804 for holding the microchips 200, arranged in a pitch substantially equal to the pitch microchips on the initial support substrate 401. The substrate 803 of the method of FIG. 9 differs from the substrate 703 of the method of FIGS. 8A to 8D mainly in that the bottom of each cavity 804 of the substrate 803 is non-planar. In other words, unlike the substrate 703 in which the entire surface of a microchip 200 opposite the connection face of the microchip is in contact with the bottom of a cavity 704 of the substrate, in the example of FIG. 9 , for each microchip 200, only a part of the surface of the microchip opposite its connection face is in contact with the bottom of the cavity 804 in which the microchip is disposed. This makes it possible to prevent unwanted adhesion of the microchips 200 to the bottom of the cavities of the substrate 803, and thus to facilitate the removal of the microchips by the transfer substrate 250 during the self-assembly step. By way of example, the bottom of each cavity 804 of the substrate 803 may have a hollow shape, for example the shape of a groove portion with a triangular section. More generally, any other non-planar shape suitable for obtaining the desired non-stick effect can be used, for example a domed shape.
    FIGS. 10A to 10E are sectional views illustrating steps of an example of an embodiment of microchips 200 of the type described in relation to FIG. 4, that is to say each comprising a plane connection face with electrical connection pads flush with the connection face of the microchip, and a ferromagnetic stud buried under the connection face of the microchip.
    In the example of FIGS. 10A to 10E, only two electrical connection pads 125 and 126 are shown on each microchip 200. In practice, the number of electrical connection pads per microchip can be greater than two.
    FIG. 10A illustrates a step during which one starts from an assembly comprising a support substrate 900, and, on the upper face of the support substrate 900, a stack 902 of semiconductor, conductive and insulating layers, in which the various components of the microchips, and in particular the LEDs 110 and the control circuits 120 (not detailed in FIGS. 10A to 10E). For example, the substrate 900 is the LED growth substrate, and each microchip comprises an LED 110 in a lower portion in contact with the upper face of the substrate 900, and a control circuit 120 in an upper portion in contact with the upper face of the LED 110. In the step of FIG. 10A, the microchips 200 have not yet been identified. Dashed lines represent the lateral edges of each microchip 200. Cutting paths 904 separate the microchips 200 from one another. At this stage, the upper face of the stack 902 comprises, for each microchip 200, two electrical connection pads 125 'and 126', intended to be connected respectively to the connection pads outside 125 and 126 of the microchip , not yet trained.
    FIG. 10B illustrates a step of depositing an insulating layer 906, for example an oxide layer, over the entire upper surface of the structure of FIG. 10A.
    FIG. 10B further illustrates a step of forming the ferromagnetic pads 202 on the upper face of the insulating layer 906. By way of example, the ferromagnetic material is first deposited on the entire upper surface of the layer 906, then etched so as to keep only one pad 202 per microchip 200.
    FIG. 10C illustrates a step of depositing an insulating layer 908, for example an oxide layer, on the entire upper surface of the structure of FIG. 10B, that is to say on the upper surface of the layer 906 and on the upper surface of the ferromagnetic pads 202. The thickness of the insulating layer 908 is preferably greater than the thickness of the ferromagnetic pads 202.
    FIG. 10C further illustrates a step of forming openings 910 passing through the insulating layers 908 and 906 opposite the electrical connection pads 125 ′ and 126 ′ of each microchip 200. The openings 910 are formed by etching from the face upper layer 908, and lead to the upper face of the electrical connection pads 125 ′, respectively 126 ′.
    FIG. 10D illustrates a step of filling the openings 910 with a conductive material, for example metal, to form the electrical connection pads 125 and 12 6 of the microchips 200. By way of example, the conductive material is deposited over the entire upper surface of the structure of FIG. 10C, over a thickness at least equal to that of the openings 910 so as to fill the openings 910. A mechanochemical polishing step is then carried out to planarize the upper surface of the structure so as to place the electrical connection pads 125 and 126 and the upper insulating layer 908 on the same level.
    FIG. 10E illustrates a step of individualizing the microchips after the formation of the electrical connection pads 125 and 126. During this step, the stack comprising the insulating layers 908 and 906 and the stack 902 is removed, in the paths cutting 904, from the upper face of the layer 908 to the upper face of the support substrate 900. This gives a plurality of microchips 200 secured to the substrate 900, each microchip being connected to the substrate 900 by its face opposite its connection face.
    Particular embodiments have been described. Various variants and modifications will appear to those skilled in the art. In particular, the embodiments described are not limited to the specific examples of dimensions and materials mentioned in the description.
    In addition, although only exemplary embodiments have been described in which each microchip comprises a ferromagnetic pad and each corresponding reception area of the transfer substrate comprises a magnet pad, it is possible, as a variant, to arrange the magnet pads in microchips and ferromagnetic pads in the transfer substrate. As a variant, the ferromagnetic pads are replaced by magnet pads, that is to say that each microchip comprises a magnet pad and each corresponding reception area also includes a magnet pad.
    It will also be noted that the studs of the microchip and the corresponding studs of the transfer substrate may have different dimensions and / or shapes.
    In addition, to further increase the alignment accuracy, it will be possible to provide several ferromagnetic pads or several magnet pads per microchip, and several corresponding magnet pads or several corresponding ferromagnetic pads per area for receiving the transfer substrate, the dimensions and / or shapes. different pads may be different.
    Furthermore, although only exemplary embodiments have been described in which the microchips transferred onto the transfer substrate each comprise an LED and an LED control circuit, the embodiments described are not limited to this case particular. Alternatively, each microchip may include a plurality of LEDs and a circuit for controlling the plurality of LEDs. In addition, in another variant, each microchip can comprise only one or more LEDs, without control circuit, the LED or LEDs of the microchip then being controlled by circuits external to the microchip, arranged for example at the periphery of the substrate of postponement.
    It will also be noted that the methods described can be applied in other fields than the production of emissive LED display devices. More generally, the methods described apply to the production of any electronic device comprising a plurality of microchips transferred onto a transfer substrate, in which the microchips are fixed and electrically connected to the transfer substrate by direct bonding, and in which each microchip comprises at least two electrical connection pads on its face for connection to the transfer substrate.
    权利要求:
    Claims (14)
    [1" id="c-fr-0001]
    1. A method of manufacturing an electronic device, comprising the following steps: a) producing a plurality of chips (200) each comprising: - a plurality of electrical connection pads (125, 126, 127, 128) arranged on one face for connecting the chip, and - at least one first stud (202) disposed in the vicinity of the connection face of the chip; b) producing a transfer substrate (250) comprising, for each chip: - a plurality of electrical connection pads (155, 156, 157, 158) arranged on a connection face of the transfer substrate, and - at least a second pad (252) disposed in the vicinity of the connection face of the transfer substrate, one of the first and second pads being a permanent magnet and the other of the first and second pads being either a permanent magnet or made of a ferromagnetic material; and c) fixing the chips (200) to the transfer substrate (250) by direct bonding so as to electrically connect the electrical connection pads (125, 126, 127, 128) of each chip to the corresponding electrical connection pads (155 , 156, 157, 158) of the transfer substrate, using the magnetization force between the first (202) and second (252) pads to align the electrical connection pads of the chips with the corresponding electrical connection pads of the substrate postponement.
    [2" id="c-fr-0002]
    2. Method according to claim 1, in which, in each chip (200), the first stud (202) opens on the side of the connection face of the microchip.
    [3" id="c-fr-0003]
    3. Method according to claim 1, in which, in each chip (200), the first stud (202) is buried under the connection face of the chip.
    [4" id="c-fr-0004]
    4. Method according to any one of claims 1 to 3, wherein, in each chip, the connection face of the chip is planar, the electrical connection pads (125, 126, 127 and 128) of the chip flush with the level of an external face of a passivation layer (203) of the chip.
    [5" id="c-fr-0005]
    5. Method according to any one of claims 1 to 4, wherein the second pads (252) open on the side of the connection face of the transfer substrate (250).
    [6" id="c-fr-0006]
    6. Method according to any one of claims 1 to 4, wherein the second studs (252) are buried under the connection face of the transfer substrate (250).
    [7" id="c-fr-0007]
    7. Method according to any one of claims 1 to 6, wherein the connection face of the transfer substrate (250) is planar, the electrical connection pads (155, 156, 157, 158) of the transfer substrate flush with the level of an external face of a passivation layer (253) of the transfer substrate.
    [8" id="c-fr-0008]
    8. Method according to any one of claims 1 to 6, in which the electrical connection pads (155, 156, 157, 158) of the transfer substrate (250) project from the connection face of the transfer substrate.
    [9" id="c-fr-0009]
    9. Method according to any one of claims 1 to 8, in which: at the end of step a), the chips (200) are arranged on a support substrate (401; 501; 603; 703; 803 ) with an inter-chip pitch smaller than the inter-chip pitch of the final display device; and in step c), several chips (200) are selectively detached from the support substrate (401; 501; 603; 703; 803) at the pitch of the final display device and fixed to the transfer substrate at this same pitch.
    [10" id="c-fr-0010]
    10. The method of claim 9, wherein: at the end of step a), the chips (200) are only placed, without bonding, on the support substrate (603; 703; 803); and in step c) the transfer substrate (250) is brought above the chips (200), connection side facing the connection faces of the chips, so as to simultaneously take several chips at the pitch of the device. final display.
    [11" id="c-fr-0011]
    11. The method of claim 10, wherein the support substrate (703; 803) comprises cavities (704; 804) in which the chips (200) are arranged so that the chips are held laterally by the walls of the cavities.
    [12" id="c-fr-0012]
    12. The method of claim 11, wherein the bottom of each cavity (804) of the support substrate (803) is non-planar.
    [13" id="c-fr-0013]
    13. Method according to any one of claims 1 to 12, wherein each chip (200) comprises a stack of an LED (110) and an active circuit (120) for controlling the LED.
    [14" id="c-fr-0014]
    14. LED emissive display device produced by a method according to any one of claims 1 to 13.
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    同族专利:
    公开号 | 公开日
    EP3625822B1|2022-01-05|
    EP3625822A1|2020-03-25|
    FR3066317B1|2020-02-28|
    US20200303359A1|2020-09-24|
    CN110832635A|2020-02-21|
    WO2018206891A1|2018-11-15|
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    法律状态:
    2018-05-28| PLFP| Fee payment|Year of fee payment: 2 |
    2018-11-16| PLSC| Publication of the preliminary search report|Effective date: 20181116 |
    2019-05-31| PLFP| Fee payment|Year of fee payment: 3 |
    2020-05-30| PLFP| Fee payment|Year of fee payment: 4 |
    2021-05-31| PLFP| Fee payment|Year of fee payment: 5 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1754045|2017-05-09|
    FR1754045A|FR3066317B1|2017-05-09|2017-05-09|METHOD FOR MANUFACTURING AN EMISSIBLE LED DISPLAY DEVICE|FR1754045A| FR3066317B1|2017-05-09|2017-05-09|METHOD FOR MANUFACTURING AN EMISSIBLE LED DISPLAY DEVICE|
    PCT/FR2018/051137| WO2018206891A1|2017-05-09|2018-05-04|Process for manufacturing an led-based emissive display device|
    CN201880044934.1A| CN110832635A|2017-05-09|2018-05-04|Method for manufacturing an LED-based emissive display device|
    EP18734867.7A| EP3625822B1|2017-05-09|2018-05-04|Method of manufacturing an emissive led display device|
    US16/611,808| US20200303359A1|2017-05-09|2018-05-04|Process for manufacturing an led-based emissive display device|
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